Ushio America UV-LED Units for Wafer Processing
Hardening photoresist and coating curved lens surfaces.
Features & Benefits
- UshioÕs unique lens design miniaturizes systems by 56% while increasing energy efficiency over standard devices (in the 200 mm type case).
- Because there is almost no illuminance reduction, no fine adjustment is needed for work at varying thickness when the irradiation distance deviates slightly from 50 mm.
