Ushio America ExciJet Excimer Irradiation Solutions

Ushio America

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UAI-ExciJet Excimer Irradiation Solutions
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Ushio America ExciJet Excimer Irradiation Solutions

Excimer irradiation is strong light energy that is generated when lamps filled with noble gas or noble gas halide compound, are pressured by high-energy electrons.

TECH TALK Ð When high-energy electron pressure is applied from the outside onto a lamp filled with a noble gas or a noble gas halide compound, the lamp releases a discharge plasma (e.g. electric barrier discharge). This discharge plasma consists of high-energy electron and disappears instantly. The discharge plasma does, however, excite the gas atoms inside to instantaneously produce an excimer state (for Xenon excimers: Xe2). When the atoms return from their excited state to their original (ground) state, the excimer-specific spectrum is emitted. This emission light is the VUV or UV-C light caused by excimer irradiation.



Features & Benefits

  • High photon energy
  • Optimized spectra Ð from single wavelength and narrow bandwidth radiation to continuous broad band spectra with the introduction of additional phosphors
  • Low temperature process / ÒcoldÓ radiation
  • Instant turn on/off function
  • Easy implementation
  • Fast and efficient process introduction
  • Mercury-free
  • Environmentally friendly


  • High photon energy
  • Optimized spectra Ð from single wavelength and narrow bandwidth radiation to continuous broad band spectra with the introduction of additional phosphors
  • Low temperature process / ÒcoldÓ radiation
  • Instant turn on/off function
  • Easy implementation
  • Fast and efficient process introduction
  • Mercury-free
  • Environmentally friendly

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