Ushio America Charge Neutralization Systems
Strong, deep ultraviolet irradiation neutralizes electric charge on EPROM and Flash memory. Neutralizes electric charge that can be problematic for plasma processing.
Features & Benefits
- UV Charge Erasure
Intense deep ultraviolet irradiation neutralizes electric charge on substrates. This system has been adopted in semiconductor manufacturing lines, with over 700 units delivered. - High-Intensity Uniform Irradiation
Guaranteed initial illuminance is 650 mW/cm2 (at 220 to 320 nm) with ±10% uniformity. - Easy Lamp Unit Replacement
System downtime is reduced because no adjustment is required when replacing the lamp unit. - Extensive Product Lineup
Supports all work cassettes including 6-inch systems (5-inch or less also available), 8-inch systems (6-inch or less also available), and 12-inch dedicated systems. An 8-inch system with an excimer lamp is also available.
- Charge neutralization (EPROM, OTP, Flash memory)
- Pre-deposition charge neutralization
- Charge neutralization to avoid plasma processing problems and more
